Detection of signal electrons at higher pressure in the specimen chamber

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F02%3APU30095" target="_blank" >RIV/00216305:26220/02:PU30095 - isvavai.cz</a>
Alternative codes found
RIV/68081731:_____/02:12020060
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Detection of signal electrons at higher pressure in the specimen chamber
Original language description
Scintillation and ionization detectors for the detection of signals at higher pressure in the specimen chamber of the scanning electron microscope. While the signal detected by the scintillation detector decreases with the growing pressure,for ionizationdetector the maximum of the signal amplification by the impact ionization in gaseous environment at a certain value of pressure is typical. This value can be influencedby the choice of the working conditions as well as the gaseous environment used.
Czech name
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Czech description
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Project
<a href="/en/project/GA102%2F01%2F1271" target="_blank" >GA102/01/1271: Study of detection methods and systems in extreme conditions of environmental scanning electron microscopy</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2002
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
Recent Trends in Charged Particle Optics and Surface Physics Instrumentation
ISBN
80-238-8986-9
ISSN
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e-ISSN
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Number of pages
2
Pages from-to
55-56
Publisher name
Institute of Scientific Instruments,Academy of Sciences of the Czech Republic Czechoslovak Microscopy Society
Place of publication
Brno
Event location
Skalský Dvůr
Event date
Jul 8, 2002
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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