Screen-printed nano-grain tin oxide films for micro-hotplate gas sensors
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F03%3APU38706" target="_blank" >RIV/00216305:26220/03:PU38706 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Screen-printed nano-grain tin oxide films for micro-hotplate gas sensors
Original language description
We report on the deposition of screen-printed tin oxide films to fabricate micromachined gas sensors. While in drop-coated or screen-printed devices the deposition of the sensing layer is usually the last step of the process, here the screen-printing wasmade before the backside silicon etching. This procedure avoids damaging the sensor membrane during the active layer deposition, which results in a excellent yield. Results on the morphology and gas sensitivity of the sensors developed are shown and disscussed.
Czech name
Screen-printed nano-grain tin oxide films for micro-hotplate gas sensors
Czech description
We report on the deposition of screen-printed tin oxide films to fabricate micromachined gas sensors. While in drop-coated or screen-printed devices the deposition of the sensing layer is usually the last step of the process, here the screen-printing wasmade before the backside silicon etching. This procedure avoids damaging the sensor membrane during the active layer deposition, which results in a excellent yield. Results on the morphology and gas sensitivity of the sensors developed are shown and disscussed.
Classification
Type
D - Article in proceedings
CEP classification
JA - Electronics and optoelectronics
OECD FORD branch
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Result continuities
Project
<a href="/en/project/GA102%2F00%2F0939" target="_blank" >GA102/00/0939: Integrated intelligent microsensors and microsystems</a><br>
Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2003
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
4th Conference on Electronic Devices
ISBN
84-607-6771-X
ISSN
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e-ISSN
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Number of pages
1
Pages from-to
145-145
Publisher name
Instituto de Microelectrónika de Barcelona CNM-CSIC
Place of publication
Calella de la Costa, Barcelona, Spain
Event location
Barcelona
Event date
Feb 12, 2003
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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