Sputtered and screen-printed metal oxide-based integrated microsensor arrays for the quantitative analysis of gas mixtures

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F04%3APU59213" target="_blank" >RIV/00216305:26220/04:PU59213 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Sputtered and screen-printed metal oxide-based integrated microsensor arrays for the quantitative analysis of gas mixtures

Original language description

Either by screen-printing or sputtering, sensitive layers of tin oxide were deposited on silicon micromachined substrates (four-element integrated microarrays). The procedures allow the deposition of sensing layers before membranes have been etched, which leads to gas micro-sensors with an excellent fabrication yield. The response of the different microarrays to ethanol, acetone and ammonia vapours and their binary mixtures was studied. The influence of ambient humidity was also investigated. By using an integrated array of four integrated microsensors operated at two different temperatures and a fuzzy ARTMAP neural network, it was possible to simultaneously identify and quantify the different species (success rate was 100%). These results confirm theviability of the techniques introduced to obtain micromachined sensors suitable for battery-powered gas/vapour monitors.

Czech name

Sputtered and screen-printed metal oxide-based integrated microsensor arrays for the quantitative analysis of gas mixtures

Czech description

Either by screen-printing or sputtering, sensitive layers of tin oxide were deposited on silicon micromachined substrates (four-element integrated microarrays). The procedures allow the deposition of sensing layers before membranes have been etched, which leads to gas micro-sensors with an excellent fabrication yield. The response of the different microarrays to ethanol, acetone and ammonia vapours and their binary mixtures was studied. The influence of ambient humidity was also investigated. By using an integrated array of four integrated microsensors operated at two different temperatures and a fuzzy ARTMAP neural network, it was possible to simultaneously identify and quantify the different species (success rate was 100%). These results confirm theviability of the techniques introduced to obtain micromachined sensors suitable for battery-powered gas/vapour monitors.

Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

JB - Sensors, detecting elements, measurement and regulation

OECD FORD branch

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Project

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Continuities

Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2004

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Sensors and Actuators B: Chemical

ISSN

0925-4005

e-ISSN

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Volume of the periodical

103

Issue of the periodical within the volume

1-2

Country of publishing house

NL - THE KINGDOM OF THE NETHERLANDS

Number of pages

8

Pages from-to

23-30

UT code for WoS article

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EID of the result in the Scopus database

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