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3D Construction View of Differential Pumping Chamber with Detector Board of Environmental Scanning Electron Microscope

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F03%3APU39875" target="_blank" >RIV/00216305:26220/03:PU39875 - isvavai.cz</a>

  • Result on the web

  • DOI - Digital Object Identifier

Alternative languages

  • Result language

    angličtina

  • Original language name

    3D Construction View of Differential Pumping Chamber with Detector Board of Environmental Scanning Electron Microscope

  • Original language description

    This paper deals with construction of the differential pumping chamber with a detector board for adaptation of the scanning electron microscope (SEM) to the environmental scanning electron microscope (ESEM). ESEM allows work at higher pressure in some parts of the microscope. It focuses especially on the 3D construction view of the differential pumping chamber together with the detector board of the differential pumping chamber and it comments reasons of necessity of the assembly of these parts into thee environmental scanning electron microscope.

  • Czech name

    3D konstrukce komory diferenciálního čerpání s detektorovou deskou v environmentálním rastrovacím elektronovém mikroskopu.

  • Czech description

    Tato publikace se zabývá využitím 3D vizualizace při konstrukci a modelování komory diferenciálního čerpání s detektorovou deskou a jejich použití při adaptaci rastrovacího elektronového mikroskopu (REM) na environmentální rastrovací elektronový mikroskop (EREM).

Classification

  • Type

    D - Article in proceedings

  • CEP classification

    JA - Electronics and optoelectronics

  • OECD FORD branch

Result continuities

  • Project

    <a href="/en/project/GA102%2F01%2F1271" target="_blank" >GA102/01/1271: Study of detection methods and systems in extreme conditions of environmental scanning electron microscopy</a><br>

  • Continuities

    Z - Vyzkumny zamer (s odkazem do CEZ)

Others

  • Publication year

    2003

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Article name in the collection

    Elektrotechnika a informatika 2003

  • ISBN

    80-7082-993-1

  • ISSN

  • e-ISSN

  • Number of pages

    4

  • Pages from-to

    96-99

  • Publisher name

    NEUVEDEN

  • Place of publication

    Plzeň

  • Event location

    Nečtiny

  • Event date

    Oct 15, 2003

  • Type of event by nationality

    CST - Celostátní akce

  • UT code for WoS article