Construction of differential pumping chamber with detector board for adaptation of scanning electron microscope working in high pressure.
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F03%3A12030047" target="_blank" >RIV/68081731:_____/03:12030047 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Construction of differential pumping chamber with detector board for adaptation of scanning electron microscope working in high pressure.
Original language description
This paper deals with adaptation of the scanning electron microscope (SEM) to the environmental scanning electron microscope (ESEM). ESEM allows work at higher pressure in some parts of the microscope. It focuses especially to the construction and assembly of the differential pumping chamber together with the detector board of the differential pumping chamber and it comments reasons of necessity of the assembly of these parts in the environmental scanning electron microscope.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
JA - Electronics and optoelectronics
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2003
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Proceedings of the International Conference and Competition Student EEICT 2003.
ISBN
80-214-2401-X
ISSN
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e-ISSN
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Number of pages
5
Pages from-to
199-203
Publisher name
Brno University of Technology
Place of publication
Brno
Event location
Brno [CZ]
Event date
Apr 24, 2003
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
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