Carbon nanotubes - manufacturing by plasma enhanced CVD.
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F05%3APU54542" target="_blank" >RIV/00216305:26220/05:PU54542 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Carbon nanotubes - manufacturing by plasma enhanced CVD.
Original language description
The microwave (mw) plasma torch at atmospheric pressure has been studied for carbon nanotubes (CNT) synthesis. The depositions were carried out on silicon substrates with 5-15 nm thin iron catalytic overlayers from the mixture of argon, hydrogen and methane. The optical emission spectroscopy of the torch showed the presence of C2 and CH radicals as well as carbon and hydrogen excited atoms. The vicinity of the substrate influenced the relative intensities and increased the emission of C2. For fixed mw ppower, the temperature of the substrate strongly depended on its position with respect to the nozzle electrode and on the gas mixture, particularly the amount of H2. The speed of the substrate heating during an early deposition phase had a significant effect on the CNT synthesis. An abrupt increase of the temperature at the beginning increased the efficiency of the CNT synthesis. Areas of dense straight standing CNTs, 30 nm in average diameter, with approximately the same sized iron nano
Czech name
Uhlíkové nanotrubice - výroba metodou PECVD.
Czech description
Pro výrobu uhlíkových nanotrubek byla použita metoda chemické depozice pomocí plasmy. Syntéza probíhá na křemíhovém vzorku s vrstvou oxidu, kde katalyzátor je železo.
Classification
Type
D - Article in proceedings
CEP classification
JA - Electronics and optoelectronics
OECD FORD branch
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Result continuities
Project
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Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2005
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Intensive Training Programme in Electronic System Design
ISBN
80-214-3042-7
ISSN
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e-ISSN
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Number of pages
3
Pages from-to
155-157
Publisher name
Technological Institute of Chania
Place of publication
Chania
Event location
Chania, Crete, Greece
Event date
Sep 21, 2005
Type of event by nationality
CST - Celostátní akce
UT code for WoS article
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