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Carbon nanotubes - manufacturing by plasma enhanced CVD.

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F05%3APU54542" target="_blank" >RIV/00216305:26220/05:PU54542 - isvavai.cz</a>

  • Result on the web

  • DOI - Digital Object Identifier

Alternative languages

  • Result language

    angličtina

  • Original language name

    Carbon nanotubes - manufacturing by plasma enhanced CVD.

  • Original language description

    The microwave (mw) plasma torch at atmospheric pressure has been studied for carbon nanotubes (CNT) synthesis. The depositions were carried out on silicon substrates with 5-15 nm thin iron catalytic overlayers from the mixture of argon, hydrogen and methane. The optical emission spectroscopy of the torch showed the presence of C2 and CH radicals as well as carbon and hydrogen excited atoms. The vicinity of the substrate influenced the relative intensities and increased the emission of C2. For fixed mw ppower, the temperature of the substrate strongly depended on its position with respect to the nozzle electrode and on the gas mixture, particularly the amount of H2. The speed of the substrate heating during an early deposition phase had a significant effect on the CNT synthesis. An abrupt increase of the temperature at the beginning increased the efficiency of the CNT synthesis. Areas of dense straight standing CNTs, 30 nm in average diameter, with approximately the same sized iron nano

  • Czech name

    Uhlíkové nanotrubice - výroba metodou PECVD.

  • Czech description

    Pro výrobu uhlíkových nanotrubek byla použita metoda chemické depozice pomocí plasmy. Syntéza probíhá na křemíhovém vzorku s vrstvou oxidu, kde katalyzátor je železo.

Classification

  • Type

    D - Article in proceedings

  • CEP classification

    JA - Electronics and optoelectronics

  • OECD FORD branch

Result continuities

  • Project

  • Continuities

    Z - Vyzkumny zamer (s odkazem do CEZ)

Others

  • Publication year

    2005

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Article name in the collection

    Intensive Training Programme in Electronic System Design

  • ISBN

    80-214-3042-7

  • ISSN

  • e-ISSN

  • Number of pages

    3

  • Pages from-to

    155-157

  • Publisher name

    Technological Institute of Chania

  • Place of publication

    Chania

  • Event location

    Chania, Crete, Greece

  • Event date

    Sep 21, 2005

  • Type of event by nationality

    CST - Celostátní akce

  • UT code for WoS article