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Optical Emission Spectroscopy of Plasmachemical Processes for Deposition of Carbon Nanotubes

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F08%3A00028443" target="_blank" >RIV/00216224:14310/08:00028443 - isvavai.cz</a>

  • Result on the web

  • DOI - Digital Object Identifier

Alternative languages

  • Result language

    čeština

  • Original language name

    Optical Emission Spectroscopy of Plasmachemical Processes for Deposition of Carbon Nanotubes

  • Original language description

    The microwave (mw) plasma torch at atmospheric pressure used for synthesis of carbon nanotubes (CNTs) has been studied by means of optical emission spectroscopy (OES). The CNT synthesis was carried out in the mixture of CH4, H2 and Ar with the iron catalyst either on the substrate or in the gas phase as achieved by addition of Fe(CO)5 vapors. he OES was also used for the determination of rotational temperature, which approximates the temperature of neutral gas due to frequent collisions of the gas particles. The program DMESS that combines the simulation of rotational spectra of diatomic molecules with fitting procedure was developed in order to obtain the rotational temperature from the structure of rotational lines of given vibrational band.

  • Czech name

    Optical Emission Spectroscopy of Plasmachemical Processes for Deposition of Carbon Nanotubes

  • Czech description

    The microwave (mw) plasma torch at atmospheric pressure used for synthesis of carbon nanotubes (CNTs) has been studied by means of optical emission spectroscopy (OES). The CNT synthesis was carried out in the mixture of CH4, H2 and Ar with the iron catalyst either on the substrate or in the gas phase as achieved by addition of Fe(CO)5 vapors. he OES was also used for the determination of rotational temperature, which approximates the temperature of neutral gas due to frequent collisions of the gas particles. The program DMESS that combines the simulation of rotational spectra of diatomic molecules with fitting procedure was developed in order to obtain the rotational temperature from the structure of rotational lines of given vibrational band.

Classification

  • Type

    D - Article in proceedings

  • CEP classification

    BL - Plasma physics and discharge through gases

  • OECD FORD branch

Result continuities

  • Project

    <a href="/en/project/KAN311610701" target="_blank" >KAN311610701: Nanometrology using methods of scanning probe microscopy</a><br>

  • Continuities

    Z - Vyzkumny zamer (s odkazem do CEZ)

Others

  • Publication year

    2008

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Article name in the collection

    Programme & Abstract Book of the 23rd Symposium on Plasma Physics and Technology, Prague, Czech Republic, 16.-19. June 2008

  • ISBN

    978-80-01-04030-0

  • ISSN

  • e-ISSN

  • Number of pages

    1

  • Pages from-to

  • Publisher name

    ČVUT v Praze, Organizační výbor symposia

  • Place of publication

    Praha

  • Event location

    Praha

  • Event date

    Jun 16, 2008

  • Type of event by nationality

    WRD - Celosvětová akce

  • UT code for WoS article