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Dielectric relaxation spectroscopy as a tool for investigation of dielectric thin films and fabrication method thereof for microcapacitor integration

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F09%3APU81089" target="_blank" >RIV/00216305:26220/09:PU81089 - isvavai.cz</a>

  • Result on the web

  • DOI - Digital Object Identifier

Alternative languages

  • Result language

    angličtina

  • Original language name

    Dielectric relaxation spectroscopy as a tool for investigation of dielectric thin films and fabrication method thereof for microcapacitor integration

  • Original language description

    Dielectric relaxation spectroscopy (DRS) is a powerful tool for the investigation of materials. DRS is based on the measurement and evaluation of the response of electric dipoles, either induced or permanent, and weakly bound electric charges to the application of external electric field. In the present research, we would like to apply the DRS for the study of physical and electrical properties of dielectric thin films. The important properties of dielectric materials, as dielectric contant and dielectric lossoften vary as temperature or frequence varies. Thus the operation range for applications varies accordingly.

  • Czech name

  • Czech description

Classification

  • Type

    D - Article in proceedings

  • CEP classification

    JA - Electronics and optoelectronics

  • OECD FORD branch

Result continuities

  • Project

  • Continuities

    Z - Vyzkumny zamer (s odkazem do CEZ)

Others

  • Publication year

    2009

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Article name in the collection

    Proceedings of IEEE Workshop Králíky 2009

  • ISBN

    978-80-214-3938-2

  • ISSN

  • e-ISSN

  • Number of pages

    4

  • Pages from-to

  • Publisher name

    Novapres

  • Place of publication

    Brno

  • Event location

    Králíky

  • Event date

    Aug 31, 2009

  • Type of event by nationality

    WRD - Celosvětová akce

  • UT code for WoS article