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Preparation of freestanding carbon nanotubes using plasma enhanced chemical vapor deposition

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F11%3APU92439" target="_blank" >RIV/00216305:26220/11:PU92439 - isvavai.cz</a>

  • Alternative codes found

    RIV/00216305:26620/11:PU92439

  • Result on the web

    <a href="http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=6053940" target="_blank" >http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=6053940</a>

  • DOI - Digital Object Identifier

Alternative languages

  • Result language

    angličtina

  • Original language name

    Preparation of freestanding carbon nanotubes using plasma enhanced chemical vapor deposition

  • Original language description

    Carbon nanotubes (CNTs) are molecular-scale tubes of graphitic carbon with outstanding properties. They are among the stiffest and strongest fibers known, and have remarkable electronic properties and many other unique characteristics. In our experiment,CNTs were synthesized using plasma enhanced chemical vapor deposition on the silicon wafer with patterned iron catalytic layer. If the catalyst is uniformly distributed, nanotubes grow everywhere on the substrate. If the catalyst is only located in certain areas (patterned), then nanotubes grow only in those areas. Iron catalytic layers with defined shapes and dimensions were prepared for carbon nanotubes growth. Various dimensions of these shapes were fabricated to monitor influence of catalytic layers. There were produced shapes from 100 nm to 10 um dimensions. Freestanding carbon nanotubes were prepared in our experiment.

  • Czech name

  • Czech description

Classification

  • Type

    D - Article in proceedings

  • CEP classification

    JA - Electronics and optoelectronics

  • OECD FORD branch

Result continuities

  • Project

    Result was created during the realization of more than one project. More information in the Projects tab.

  • Continuities

    Z - Vyzkumny zamer (s odkazem do CEZ)

Others

  • Publication year

    2011

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Article name in the collection

    ISSE 2011, 34th International Spring Seminar on Electronics Technology, Conference Proceedings

  • ISBN

    978-1-4577-2112-0

  • ISSN

  • e-ISSN

  • Number of pages

    4

  • Pages from-to

    515-518

  • Publisher name

    Technical University of Košice

  • Place of publication

    Košice

  • Event location

    Tatranská Lomnica

  • Event date

    May 11, 2011

  • Type of event by nationality

    EUR - Evropská akce

  • UT code for WoS article