Slip flow analysis in an experimental chamber simulating dif-ferential pumping in the Environmental Scanning Electron Microscope

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F22%3APU146101" target="_blank" >RIV/00216305:26220/22:PU146101 - isvavai.cz</a>

Result on the web

<a href="https://www.mdpi.com/1424-8220/22/23/9033" target="_blank" >https://www.mdpi.com/1424-8220/22/23/9033</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.3390/s22239033" target="_blank" >10.3390/s22239033</a>

Result language

angličtina

Original language name

Slip flow analysis in an experimental chamber simulating dif-ferential pumping in the Environmental Scanning Electron Microscope

Original language description

The paper describes the combination of experimental measurements with mathemati-cal-physics analysis during the investigation of the flow in the aperture at low pressures in a prepared experimental chamber. In the first step, experimental measurements of the pressure in the specimen chamber and at its outlet were performed during the pumping of this chamber from atmospheric pressure to the operating pressure typical for the current AQUASEM II environmental electron microscope at the ISI of the CAS in Brno. Based on these results, a mathematical-physics model was tuned in Ansys Fluent system and sub-sequently used for mathematical-physics analysis in the Slip Flow regime on the nozzle wall at low pressure. These analyzes will be used to fine-tune the experimental chamber and, once the chamber is operational, it will be possible to compare the results obtained from experimental measurements of nozzle wall pressure, static and total pressure, and temperature from the nozzle axis region in supersonic flow with the results obtained from the mathematical-physics analyses. Based on the above comparative analyses, we will be able to determine the realistic Slip Flow at the nozzle wall under different conditions at the continuum mechanics boundary.

Czech name

—

Czech description

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Type

J_imp - Article in a specialist periodical, which is included in the Web of Science database

CEP classification

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OECD FORD branch

20201 - Electrical and electronic engineering

Project

—

Continuities

S - Specificky vyzkum na vysokych skolach

Publication year

2022

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

SENSORS

ISSN

1424-8220

e-ISSN

1424-3210

Volume of the periodical

22

Issue of the periodical within the volume

23

Country of publishing house

CH - SWITZERLAND

Number of pages

24

Pages from-to

1-24

UT code for WoS article

000896228100001

EID of the result in the Scopus database

2-s2.0-85143788806