The Impact of Nozzle Opening Thickness on Flow Characteristics and Primary Electron Beam Scattering in an Environmental Scanning Electron Microscope

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F24%3A00585464" target="_blank" >RIV/68081731:_____/24:00585464 - isvavai.cz</a>

Alternative codes found

RIV/00216305:26220/24:PU151127

Result on the web

<a href="https://www.mdpi.com/1424-8220/24/7/2166" target="_blank" >https://www.mdpi.com/1424-8220/24/7/2166</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.3390/s24072166" target="_blank" >10.3390/s24072166</a>

Result language

angličtina

Original language name

The Impact of Nozzle Opening Thickness on Flow Characteristics and Primary Electron Beam Scattering in an Environmental Scanning Electron Microscope

Original language description

This paper describes the methodology of combining experimental measurements with mathematical-physics analyses in the investigation of flow in the aperture and nozzle. The aperture and nozzle separate the differentially pumped chamber from the specimen chamber in an environmental scanning electron microscope (ESEM). Experimental measurements are provided by temperature and pressure sensors that meet the demanding conditions of cryogenic temperature zones and low pressures. This aperture maintains the required pressure difference between the chambers. Since it separates the large pressure gradient, critical flow occurs on it and supersonic gas flow with the characteristic properties of critical flow in the state variables occurs behind it. As a primary electron beam passes through the differential pumped chamber and the given aperture, the aperture is equipped with a nozzle. The shape of the nozzle strongly influences the character of the supersonic flow. The course of state variables is also strongly influenced by this shape, thus, it affects the number of collisions the primary beam's electrons have with gas molecules, and so the resulting image. This paper describes experimental measurements made using sensors under laboratory conditions in a specially created experimental chamber. Then, validation using mathematical-physical analysis in the Ansys Fluent system is described.

Czech name

—

Czech description

—

Type

J_imp - Article in a specialist periodical, which is included in the Web of Science database

CEP classification

—

OECD FORD branch

20201 - Electrical and electronic engineering

Project

<a href="/en/project/GA22-25799S" target="_blank" >GA22-25799S: Correlative Fluorescence Microscopy and Advanced Low-energy ESEM for Imaging of Immuno-Labelled Wet Biological Samples.</a><br>

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2024

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Sensors

ISSN

1424-8220

e-ISSN

1424-8220

Volume of the periodical

24

Issue of the periodical within the volume

7

Country of publishing house

CH - SWITZERLAND

Number of pages

27

Pages from-to

2166

UT code for WoS article

001200806600001

EID of the result in the Scopus database

2-s2.0-85190300735