Design and Fabrication of Fully Implantable MEMS Cochlea
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26620%2F14%3APU111570" target="_blank" >RIV/00216305:26620/14:PU111570 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Design and Fabrication of Fully Implantable MEMS Cochlea
Original language description
The micro-electro-mechanical array for application as fully implantable cochlea is presented in this paper. The complete system including a short overview of energy harvesting and the system configuration is proposed. This study mainly covers mechanicalproperties of cochlea microfabricated silicon structure. Electro-mechanical simulations are proceeded to optimize the material used for resonators, the size of array membranes and to estimate the resistive change due to the input sound signal. The soundis detected by thin SiXNY diaphragm due to resonant frequency and the displacement of the membrane caused by acoustic pressure. The displacement is detected employing piezoresistive electrodes (NiCr). Design and fabrication process based on MEMS technology are described and discussed. The response measurement of the cochlea structure is performed.
Czech name
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Czech description
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Classification
Type
O - Miscellaneous
CEP classification
JB - Sensors, detecting elements, measurement and regulation
OECD FORD branch
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Result continuities
Project
<a href="/en/project/GA13-18219S" target="_blank" >GA13-18219S: Research of the micro electro mechanical artificial cochlea based on mechanical filter bank</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2014
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů