Design and Fabrication of Fully Implantable MEMS Cochlea
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26620%2F15%3APU114101" target="_blank" >RIV/00216305:26620/15:PU114101 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1016/j.proeng.2015.01.487" target="_blank" >http://dx.doi.org/10.1016/j.proeng.2015.01.487</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.proeng.2015.01.487" target="_blank" >10.1016/j.proeng.2015.01.487</a>
Alternative languages
Result language
angličtina
Original language name
Design and Fabrication of Fully Implantable MEMS Cochlea
Original language description
The micro-electro-mechanical array for application as fully implantable cochlea is presented in this paper. The complete system including a short overview of energy harvesting and the system configuration is proposed. This study mainly covers mechanical properties of cochlea microfabricated silicon structure. Electro-mechanical simulations are proceeded to optimize the material used for resonators, the size of array membranes and to estimate the resistive change due to the input sound signal. The sound is detected by thin SiXNY diaphragm due to resonant frequency and the displacement of the membrane caused by acoustic pressure. The displacement is detected employing piezoresistive electrodes (NiCr). Design and fabrication process based on MEMS technology are described and discussed. The response measurement of the cochlea structure is performed.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
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OECD FORD branch
20201 - Electrical and electronic engineering
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>S - Specificky vyzkum na vysokych skolach
Others
Publication year
2015
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Proceeedings of DAAAM International Symposium on Intelligent Manufacturing and Automation 2014
ISBN
978-3-901509-99-5
ISSN
1876-6102
e-ISSN
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Number of pages
8
Pages from-to
1224-1231
Publisher name
Elsevier Ltd
Place of publication
Vienna
Event location
Vienna
Event date
Nov 26, 2014
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
000380551900152