Gas sensor based on MEMS cantilever resonator

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26620%2F15%3APU113944" target="_blank" >RIV/00216305:26620/15:PU113944 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Gas sensor based on MEMS cantilever resonator
Original language description
The aim of this work is about fabrication of MEMS gas sensor based on resonance cantilever beam. Cantilever will exploit piezoelectric effect; frequency of oscillation is measured with change of load of cantilever. Loading of cantilever is dependent on molecules bind on active layer which could be realized by using polymers, carbon nanotubes, etc. Sensor will be created as sandwich structure with silicon oxide passivation layer. Bottom electrode will be made from titanium. It is very important to reachrequired crystallographic structure of piezoelectric aluminum nitride layer with c-axis orientation which is in the middle of electrodes. This crystallographic structure is affected by crystallographic structure of titanium layer. Top electrode will be fabricated from gold. Width of cantilever beam will be in range from 50 ?m to 200 ?m and length will be in range from 100 ?m to 800 ?m with thickness about 2.5 ?m. These dimensions will be optimized to find ideal resonance of cantilever. M
Czech name
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Czech description
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2015
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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