Scanning Double-Beam Laser Interferometer with Loop-Back Compensation and Phase Stabilization
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26620%2F19%3APU133143" target="_blank" >RIV/00216305:26620/19:PU133143 - isvavai.cz</a>
Result on the web
<a href="https://ieeexplore.ieee.org/abstract/document/8826963" target="_blank" >https://ieeexplore.ieee.org/abstract/document/8826963</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1109/I2MTC.2019.8826963" target="_blank" >10.1109/I2MTC.2019.8826963</a>
Alternative languages
Result language
angličtina
Original language name
Scanning Double-Beam Laser Interferometer with Loop-Back Compensation and Phase Stabilization
Original language description
An accurate characterization of piezoelectric films is essential for their usage in various types of MEMS sensors and actuators. This paper presents a novel scanning double-beam laser interferometer (DBLI) to measure the thickness piezoelectric coefficient with a high accuracy. Compared to previous DBLI solutions, we employ a closed-loop phase shift compensation via an electro-optical modulator to stabilize the random phase drift as well as to compensate the harmonic sample-induced phase shift. As a consequence, the setup robustness is enhanced and the measured displacement is no more sensitive to sample reflectivity or source and detector signal gains, which allows to use the DBLI as scanning.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
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OECD FORD branch
20201 - Electrical and electronic engineering
Result continuities
Project
<a href="/en/project/LQ1601" target="_blank" >LQ1601: CEITEC 2020</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2019
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
2019 IEEE International Instrumentation and Measurement Technology Conference (I2MTC 2019) Proceedings
ISBN
978-1-5386-3460-8
ISSN
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e-ISSN
—
Number of pages
6
Pages from-to
466-471
Publisher name
IEEE
Place of publication
Piscataway; USA
Event location
Auckland
Event date
May 20, 2019
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
000568630900085