DOUBLE-BEAM MACH-ZEHNDER INTERFEROMETER FOR THIN PIEZOELECTRIC FILMS MEASUREMENT
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F17%3APU123455" target="_blank" >RIV/00216305:26220/17:PU123455 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
DOUBLE-BEAM MACH-ZEHNDER INTERFEROMETER FOR THIN PIEZOELECTRIC FILMS MEASUREMENT
Original language description
This paper describes a Mach-Zehnder double-beam interferometer for measurement of piezoelectric films thickness displacement. The measurement of the sample from both sides with probing beam leads to suppression of bending effect, which can otherwise strongly degrade the results acquired by other methods. The performances of the setup were tested on a reference PZT sample. The measured piezoelectric coefficient was in agreement with its theoretical value. The described setup utilizes minimal number of the optical components which are necessary for controlled phase drift compensation. Further techniques for performance enhancement are also proposed.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
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OECD FORD branch
20201 - Electrical and electronic engineering
Result continuities
Project
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Continuities
S - Specificky vyzkum na vysokych skolach
Others
Publication year
2017
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Proceedings of the 23rd Conference STUDENT EEICT 2017
ISBN
978-80-214-5496-5
ISSN
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e-ISSN
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Number of pages
5
Pages from-to
441-445
Publisher name
Neuveden
Place of publication
Neuveden
Event location
Brno
Event date
Apr 27, 2017
Type of event by nationality
CST - Celostátní akce
UT code for WoS article
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