The formation-properties of porous-alumina-embedded hafnium-oxide nanorod arrays

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26620%2F19%3APU134838" target="_blank" >RIV/00216305:26620/19:PU134838 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
The formation-properties of porous-alumina-embedded hafnium-oxide nanorod arrays
Original language description
Hafnium-oxide film with the self-organized nanostructured 3-dimentional architecture is synthesized via the anodizing of thin Al-Hf layers in a phosphoric acid electrolyte. The process involves the growth of a porous alumina film, followed by pore-assisted oxidation of the Hf underlayer. The film consists of HfOx nanorods anchored to continuous hafnium-oxide bottom layer that forms under the pores. Post-anodizing treatments include annealing at 600C in air or vacuum. From the EIS measurements and Mott-Schottky analysis of the as anodized and air-annealed films, the bottom oxide behaves as a good dielectric whereas the nanorods exhibit semiconducting properties. The annealing in vacuum makes the film fully semiconducting, with a unique gradient in film crystal structure, composition, and properties across the film thickness. Potential applications are as dielectrics for electrolytic or on-chip capacitors, and as active layers for gas microsensors
Czech name
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Czech description
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Project
<a href="/en/project/GA17-13732S" target="_blank" >GA17-13732S: Multifunctional nanoarrays of HfO2- and ZrO2-based electroceramics highly aligned on substrates (ZiHaN)</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2019
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
Proceedings of 7th International Conference on ADVANCES IN ELECTRONIC AND PHOTONIC TECHNOLOGIES
ISBN
978-80-554-1568-0
ISSN
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e-ISSN
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Number of pages
4
Pages from-to
19-22
Publisher name
University of Zilina in EDIS - Publishing Centre of UZ
Place of publication
Zilina, Slobak republic
Event location
Žilina
Event date
Jun 1, 2015
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
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