Gradients of microstructure, stresses and mechanical properties in a multi-layered diamond thin film revealed by correlative cross-sectional nano-analytics

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26620%2F19%3APU144218" target="_blank" >RIV/00216305:26620/19:PU144218 - isvavai.cz</a>

Result on the web

<a href="https://linkinghub.elsevier.com/retrieve/pii/S0008622318312284" target="_blank" >https://linkinghub.elsevier.com/retrieve/pii/S0008622318312284</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.carbon.2018.12.093" target="_blank" >10.1016/j.carbon.2018.12.093</a>

Result language

angličtina

Original language name

Gradients of microstructure, stresses and mechanical properties in a multi-layered diamond thin film revealed by correlative cross-sectional nano-analytics

Original language description

Thin diamond films deposited by chemical vapour deposition (CVD) usually feature cross-sectional gradients of microstructure, residual stress and mechanical properties, which decisively influence their functional properties. This work introduces a novel correlative cross-sectional nano-analytics approach, which is applied to a multi-layered CVD diamond film grown using microwave plasma-enhanced CVD and consisting of a similar to 8 mu m thick nanocrystalline (NCD) base and a similar to 14.5 mu m thick poly-crystalline (PCD) top diamond sublayers. Complementary cross-sectional 30 nm beam synchrotron X-ray diffraction, depth-resolved micro-cantilever and hardness testing and electron microscopy analyses reveal correlations between microstructure, residual stress and mechanical properties. The NCD sublayer exhibits a 1.5 mu m thick isotropic nucleation region with the highest stresses of similar to 1.3 GPa and defect-rich nanocrystallites. With increasing sublayer thickness, a < 110 > fibre texture evolves gradually, accompanied by an increase in crystallite size and a decrease in stress. At the NCD/PCD sublayer interface, texture, stresses and crystallite size change abruptly and the PCD sublayer exhibits the presence of Zone T competitive grain growth microstructure. NCD and PCD sublayers differ in fracture stresses of similar to 14 and similar to 31 GPa, respectively, as well as in elastic moduli and hardness, which are correlated with their particular microstructures. In summary, the introduced nano-analytics approach provides complex correlations between microstructure, stresses, functional properties and deposition conditions. (C) 2018 Elsevier Ltd. All rights reserved.

Czech name

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Czech description

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Type

J_imp - Article in a specialist periodical, which is included in the Web of Science database

CEP classification

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OECD FORD branch

10403 - Physical chemistry

Project

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Continuities

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Publication year

2019

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

CARBON

ISSN

0008-6223

e-ISSN

1873-3891

Volume of the periodical

144

Issue of the periodical within the volume

1

Country of publishing house

US - UNITED STATES

Number of pages

9

Pages from-to

666-674

UT code for WoS article

000459991900074

EID of the result in the Scopus database

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