The effect of thickness and film homogeneity on the optical and microstructures of the ZrO2 thin films prepared by electron beam evaporation method
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26620%2F21%3APU142116" target="_blank" >RIV/00216305:26620/21:PU142116 - isvavai.cz</a>
Result on the web
<a href="https://link.springer.com/article/10.1007%2Fs11082-021-03079-4" target="_blank" >https://link.springer.com/article/10.1007%2Fs11082-021-03079-4</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1007/s11082-021-03079-4" target="_blank" >10.1007/s11082-021-03079-4</a>
Alternative languages
Result language
angličtina
Original language name
The effect of thickness and film homogeneity on the optical and microstructures of the ZrO2 thin films prepared by electron beam evaporation method
Original language description
In this study, ZrO2 coatings with different thicknesses were grown by the electron beam evaporation technique. The crystalline structure was studied by XRD analysis which suggested the tetragonal and monoclinic phases for ZrO2 coatings. Additionally, the film thickness slightly enhanced the crystallinity. The surface morphology and fractal features were analyzed using Scanning Electron Microscopy (SEM). The surface statistical parameters and the fractal geometry were employed to analyze the impact of the coating thickness and homogeneity on the morphology of the films. The statistical processing and fractal dimension revealed variations in the morphology parameters due to the electron beam evaporation method applied for different thicknesses of samples. Based on these results, it can be concluded that the surface microtexture and fractal dimension area correlated with the thickness and homogeneity of the crystalline structure.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
20506 - Coating and films
Result continuities
Project
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Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2021
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Optical and Quantum Electronics
ISSN
0306-8919
e-ISSN
1572-817X
Volume of the periodical
53
Issue of the periodical within the volume
8
Country of publishing house
NL - THE KINGDOM OF THE NETHERLANDS
Number of pages
12
Pages from-to
„441-1“-„441-12“
UT code for WoS article
000692740100024
EID of the result in the Scopus database
2-s2.0-85111171188