The Growth, Composition, and Functional Properties of Self-Organized Nanostructured ZrO2-Al2O3 Anodic Films for Advanced Dielectric Applications
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26620%2F21%3APU142204" target="_blank" >RIV/00216305:26620/21:PU142204 - isvavai.cz</a>
Result on the web
<a href="https://onlinelibrary.wiley.com/doi/10.1002/aelm.202100505" target="_blank" >https://onlinelibrary.wiley.com/doi/10.1002/aelm.202100505</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1002/aelm.202100505" target="_blank" >10.1002/aelm.202100505</a>
Alternative languages
Result language
angličtina
Original language name
The Growth, Composition, and Functional Properties of Self-Organized Nanostructured ZrO2-Al2O3 Anodic Films for Advanced Dielectric Applications
Original language description
An aluminum-on-zirconium bilayer is anodized in oxalic acid solution to transform the Al layer into porous anodic alumina (PAA); this is followed by the PAA-assisted re-anodizing of the Zr underlayer at voltages 40-280 V. The process results in an array of amorphous ZrO2 nanocolumns, 45-330 nm long, partly filling the PAA pores and anchored to a continuous bottom oxide layer under the pores, 20-130 nm thick, comprising a ZrO1.8 spongelike sublayer superimposed on a ZrO1.5 compact sublayer. The thicknesses of the nanostructured and bottom oxides increase linearly with re-anodizing voltage, disclosing a low film formation ratio of 1.65 nm V-1, which is impossible with anodic ZrO2. The amorphous ZrO2 nanocolumns embedded in the highly resistive amorphous PAA matrix combined with the laminated bottom oxide reveal a nearly ideal dielectric performance in a wide frequency range (10(-4)-10(4) Hz) complemented by the low leakage currents and high breakdown voltages (up to 280 V). The film permittivity may be tuned, from 11 to 20, by combining the anodizing and pore-widening techniques. The advantageous architecture, fabrication approach, and functional properties of the films allow the design of a prototype of an emerging hybrid polymer electrolytic microcapacitor for on-chip integration.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
21001 - Nano-materials (production and properties)
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2021
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
MATERIALS CHEMISTRY FRONTIERS
ISSN
2052-1537
e-ISSN
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Volume of the periodical
7
Issue of the periodical within the volume
2100505
Country of publishing house
GB - UNITED KINGDOM
Number of pages
13
Pages from-to
1-13
UT code for WoS article
000693695000001
EID of the result in the Scopus database
2-s2.0-85114346909