Effect of Pressure and Temperature on Microstructure of Self-Assembled Gradient AlxTi1-xN Coatings
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26620%2F21%3APU142255" target="_blank" >RIV/00216305:26620/21:PU142255 - isvavai.cz</a>
Result on the web
<a href="https://www.mdpi.com/2079-6412/11/4/416" target="_blank" >https://www.mdpi.com/2079-6412/11/4/416</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.3390/coatings11040416" target="_blank" >10.3390/coatings11040416</a>
Alternative languages
Result language
angličtina
Original language name
Effect of Pressure and Temperature on Microstructure of Self-Assembled Gradient AlxTi1-xN Coatings
Original language description
The correlation between structural properties of Al-rich self-assembled nano-lamellar AlxTi1-xN coatings and process parameters used during their chemical vapor deposition (CVD) remains unexplored. For this article, two gradient AlxTi1-xN coatings were prepared by a stepwise increase in temperature and pressure in the ranges of 750-860 degrees C and 1.56 to 4.5 kPa during the depositions at a constant composition of the process gas mixture. The cross-sectional properties of the coatings were analyzed using X-ray nanodiffraction (CSnanoXRD) and electron microscopy. Experimental results indicate that the variation of the process parameters results in changes in microstructure, grain morphology, elastic strain, nanolamellae's chemistry and bi-layer period. At temperatures of similar to 750-800 degrees C and pressures of 2.5-4.5 kPa, preferably cubic nanolamellar grains are formed, whose microstructure correlates with the build-up of tensile stresses, which become relaxed in coating regions filled with nanocrystalline grains. CSnanoXRD superlattice satellite reflections indicate the period of the cubic Al(Ti)N-Ti(Al)N bilayers, which changes from 6.7 to 9 nm due to the temperature increase from 750 to similar to 810 degrees C, while it remains nearly unaffected by the pressure variation. In summary, our study documents that CVD process parameters can be used to tune microstructural properties of self-assembled AlxTi1-xN nanolamellae as well as the coatings' grain morphology.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
20506 - Coating and films
Result continuities
Project
<a href="/en/project/LM2018110" target="_blank" >LM2018110: CzechNanoLab research infrastructure</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2021
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Coatings, MDPI
ISSN
2079-6412
e-ISSN
—
Volume of the periodical
11
Issue of the periodical within the volume
4
Country of publishing house
CH - SWITZERLAND
Number of pages
15
Pages from-to
„416-1“-„416-15“
UT code for WoS article
000642933300001
EID of the result in the Scopus database
2-s2.0-85104189445