Determination of Optical and Structural Parameters of Thin Films with Differently Rough Boundaries

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26620%2F24%3APU154743" target="_blank" >RIV/00216305:26620/24:PU154743 - isvavai.cz</a>

Alternative codes found

RIV/00177016:_____/24:N0000144 RIV/00216224:14310/24:00137679

Result on the web

<a href="https://www.mdpi.com/2079-6412/14/11/1439" target="_blank" >https://www.mdpi.com/2079-6412/14/11/1439</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.3390/coatings14111439" target="_blank" >10.3390/coatings14111439</a>

Result language

angličtina

Original language name

Determination of Optical and Structural Parameters of Thin Films with Differently Rough Boundaries

Original language description

The optical characterization of non-absorbing, homogeneous, isotropic polymer-like thin films with correlated, differently rough boundaries is essential in optimizing their performance in various applications. A central aim of this study is to derive the general formulae necessary for the characterization of such films. The applicability of this theory is illustrated through the characterization of a polymer-like thin film deposited by plasma-enhanced chemical vapor deposition onto a silicon substrate with a randomly rough surface, focusing on the analysis of its rough boundaries over a wide range of spatial frequencies. The method is based on processing experimental data obtained using variable-angle spectroscopic ellipsometry and spectroscopic reflectometry. The transition layer is considered at the lower boundary of the polymer-like thin film. The spectral dependencies of the optical constants of the polymer-like thin film and the transition layer are determined using the Campi-Coriasso dispersion model. The reflectance data are processed using a combination of Rayleigh-Rice theory and scalar diffraction theory in the near-infrared and visible spectral ranges, while scalar diffraction theory is used for the processing of reflectance data within the ultraviolet range. Rayleigh-Rice theory alone is sufficient for the processing of the ellipsometric data across the entire spectral range. We accurately determine the thicknesses of the polymer-like thin film and the transition layer, as well as the roughness parameters of both boundaries, with the root mean square (rms) values cross-validated using atomic force microscopy. Notably, the rms values derived from optical measurements and atomic force microscopy show excellent agreement. These findings confirm the reliability of the optical method for the detailed characterization of thin films with differently rough boundaries, supporting the applicability of the proposed method in high-precision film analysis.

Czech name

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Czech description

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Type

J_imp - Article in a specialist periodical, which is included in the Web of Science database

CEP classification

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OECD FORD branch

20501 - Materials engineering

Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year

2024

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Coatings, MDPI

ISSN

2079-6412

e-ISSN

—

Volume of the periodical

14

Issue of the periodical within the volume

11

Country of publishing house

CH - SWITZERLAND

Number of pages

20

Pages from-to

„“-„“

UT code for WoS article

001364101000001

EID of the result in the Scopus database

2-s2.0-85210172465