Precursor gas composition optimisation for large area boron doped nano-crystalline diamond growth by MW-LA-PECVD
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F26722445%3A_____%2F18%3AN0000008" target="_blank" >RIV/26722445:_____/18:N0000008 - isvavai.cz</a>
Alternative codes found
RIV/68378271:_____/18:00489332 RIV/61388955:_____/18:00489332 RIV/68407700:21460/18:00320882
Result on the web
<a href="http://dx.doi.org/10.1016/j.carbon.2017.11.063" target="_blank" >http://dx.doi.org/10.1016/j.carbon.2017.11.063</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.carbon.2017.11.063" target="_blank" >10.1016/j.carbon.2017.11.063</a>
Alternative languages
Result language
angličtina
Original language name
Precursor gas composition optimisation for large area boron doped nano-crystalline diamond growth by MW-LA-PECVD
Original language description
We report on the optimisation of precursor gas composition for the repeatable preparation of large area highly conductive boron doped nano-crystalline diamond layers with low sp(2) content using microwave plasma enhanced linear antenna chemical vapour deposition apparatus. The precursor gas composition parameter space was probed by varying the boron, oxygen and carbon atomic ratios whilst fixing all other parameters constant. By radically increasing the B content and careful consideration of the B and O content in the gas phase, thin B-NCD layers (similar to 300 nm) were prepared over large areas, repeatable, with high boron concentrations (similar to 2 x 10(21) at/cm(3)) and electrical conductivity levels akin to B-NCD layers prepared in conventional MW PECVD systems (> 35 S cm(-1)) with electrochemical properties suitable for industrial applications.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
20401 - Chemical engineering (plants, products)
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2018
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Carbon
ISSN
0008-6223
e-ISSN
1873-3891
Volume of the periodical
128
Issue of the periodical within the volume
March
Country of publishing house
GB - UNITED KINGDOM
Number of pages
8
Pages from-to
164-171
UT code for WoS article
000418479900019
EID of the result in the Scopus database
2-s2.0-85036452139