Large area deposition of boron doped nano-crystalline diamond films at low temperatures using microwave plasma enhanced chemical vapour deposition with linear antenna delivery

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F14%3A00431502" target="_blank" >RIV/68378271:_____/14:00431502 - isvavai.cz</a>

Alternative codes found

RIV/61389005:_____/14:00431502 RIV/00216275:25310/14:39897654

Result on the web

<a href="http://dx.doi.org/10.1016/j.diamond.2014.05.002" target="_blank" >http://dx.doi.org/10.1016/j.diamond.2014.05.002</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.diamond.2014.05.002" target="_blank" >10.1016/j.diamond.2014.05.002</a>

Result language

angličtina

Original language name

Large area deposition of boron doped nano-crystalline diamond films at low temperatures using microwave plasma enhanced chemical vapour deposition with linear antenna delivery

Original language description

We report on the preparation and characterisation of boron (B) doped nano-crystalline diamond (BNCD) layers grown over large areas (up to 50cm x 30cm) and at low substrate temperatures (<650°C) using microwave plasma enhanced chemical vapour deposition apparatus with linear antenna delivery apparatus (MW-LA-PECVD). B-NCD layers were grown in H2/CH4/CO2 and H2/CH4 gas mixtures with added trimethylboron (TMB). Layers with thicknesses of 150nm to 1?m have been prepared with B/C ratios up to 15000ppm over arange of CO2/CH4 ratios to study the effect of oxygen (O) on the incorporation rate of B into the solid phase and the effect on the quality of the BNCD with respect to sp3/sp2 ratio. Experimental results show the reduction of boron acceptor concentration with increasing CO2 concentration. Higher sp3/sp2 ratios were measured by Raman spectroscopy with increasing TMB concentration in the gas phase without CO2.

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BM - Solid-state physics and magnetism

OECD FORD branch

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Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year

2014

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Diamond and Related Materials

ISSN

0925-9635

e-ISSN

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Volume of the periodical

47

Issue of the periodical within the volume

AUG

Country of publishing house

CH - SWITZERLAND

Number of pages

8

Pages from-to

27-34

UT code for WoS article

000340318100004

EID of the result in the Scopus database

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