Effect of plasma composition on nanocrystalline diamond layers deposited by a microwave linear antenna plasma-enhanced chemical vapour deposition system
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61388955%3A_____%2F15%3A00454568" target="_blank" >RIV/61388955:_____/15:00454568 - isvavai.cz</a>
Alternative codes found
RIV/68378271:_____/15:00454568 RIV/68407700:21460/15:00237819 RIV/00216275:25310/15:39899561
Result on the web
<a href="http://dx.doi.org/10.1002/pssa.201532183" target="_blank" >http://dx.doi.org/10.1002/pssa.201532183</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1002/pssa.201532183" target="_blank" >10.1002/pssa.201532183</a>
Alternative languages
Result language
angličtina
Original language name
Effect of plasma composition on nanocrystalline diamond layers deposited by a microwave linear antenna plasma-enhanced chemical vapour deposition system
Original language description
The addition of CO2 into the process gas has a significant impact on the quality and the incorporation of boron in CVD diamond layers. In this report we study the effect of CO2 addition in the gas phase on the properties of boron doped nano-crystalline diamond (BNCD) layers grown at low substrate temperatures (450–500 °C) using a microwave linear antenna plasma-enhanced chemical vapour deposition apparatus (MW-LA-PECVD). Experimental results show an increase in the layers' conductivity with a reduction in CO2 concentration, which is consistent with the variation in the atomic boron emission line intensity measured by optical emission spectroscopy (OES). At CO2 concentrations close to zero, we observed the formation of a smooth, transparent and highly resistive layer on unseeded substrates.
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BM - Solid-state physics and magnetism
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2015
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Physica Status Solidi. A
ISSN
1862-6300
e-ISSN
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Volume of the periodical
212
Issue of the periodical within the volume
11
Country of publishing house
DE - GERMANY
Number of pages
6
Pages from-to
2418-2423
UT code for WoS article
000366588100006
EID of the result in the Scopus database
2-s2.0-84934342494