Growth rate enhancement and morphology engineering of diamond films by adding CO2 or N2 in hydrogen rich gas chemistry
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F14%3A00432636" target="_blank" >RIV/68378271:_____/14:00432636 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1166/asem.2014.1571" target="_blank" >http://dx.doi.org/10.1166/asem.2014.1571</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1166/asem.2014.1571" target="_blank" >10.1166/asem.2014.1571</a>
Alternative languages
Result language
angličtina
Original language name
Growth rate enhancement and morphology engineering of diamond films by adding CO2 or N2 in hydrogen rich gas chemistry
Original language description
Diamond films and structures were grown by MWCVD. We show that increasing of CH4 concentration in the gas mixture up to 8% results almost in a linear increasing of growth rate (up to 900 nm/h). Unfortunately, diamond film quality decreases due to the dominance of sp2 carbon phases, as confirmed by Raman measurements. Furthermore, increasing of CH4 concentration also enhances spontaneous nucleation. Addition of N2 and CO2 into CH4/H2 gas mixture also enhances the growth rate. Nitrogen shifts the film morphology from micro- to nanocrystalline. For enough high methane concentration (>5% CH4), increasing of nitrogen further shifts the diamond growth in formation of nanowire like structures. In opposite to the nitrogen addition, adding CO2 to the gas mixture improved the film quality. In this case, a higher methane concentration can be used to increase the growth rate while keeping good enough film quality.
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BM - Solid-state physics and magnetism
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2014
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Advanced Science, Engineering and Medicine
ISSN
2164-6627
e-ISSN
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Volume of the periodical
6
Issue of the periodical within the volume
7
Country of publishing house
US - UNITED STATES
Number of pages
7
Pages from-to
749-755
UT code for WoS article
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EID of the result in the Scopus database
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