Characterization of off-axis single target RF magnetron co-sputtered iron doped tin oxide films

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F44555601%3A13440%2F10%3A00005528" target="_blank" >RIV/44555601:13440/10:00005528 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Characterization of off-axis single target RF magnetron co-sputtered iron doped tin oxide films

Original language description

The iron doped SnO2 coatings for sensor applications were studied by AFM, XPS, RBS and XRD techniques. The coatings were deposited by a magnetron sputtering from a single SnO2 target with an iron inset. Two different off-axis deposition arrangements wereinvestigated. The iron concentration in the coating was controlled in the range from 0 up to 5 at.% by two basic external parameters, the fraction of the iron stripe directly in the erosion zone and the RF power. The deposition process was reproducibleand deposited substoichiometric Fe:SnO2 films were homogenous, flat, amorphous and thermally stable up to post deposition annealing at 600 °C. The elevated deposition temperatures up to 400 °C and post annealing up to 600 °C for 10 min or 400 °C for 25 hhad no significant influence on the composition, the topology and the structure of coatings. The iron dopant in the film has probably ?-Fe2O3 bonding structure. DOI: 10.1016/j.surfcoat.2010.06.040

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BM - Solid-state physics and magnetism

OECD FORD branch

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Project

<a href="/en/project/KAN400720701" target="_blank" >KAN400720701: Hierarchic nanosystems for microelektronics</a><br>

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2010

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Surface and coatings technology

ISSN

0257-8972

e-ISSN

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Volume of the periodical

205

Issue of the periodical within the volume

1

Country of publishing house

CH - SWITZERLAND

Number of pages

5

Pages from-to

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UT code for WoS article

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EID of the result in the Scopus database

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