Characterization of off-axis single target RF magnetron co-sputtered iron doped tin

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61389005%3A_____%2F10%3A00353788" target="_blank" >RIV/61389005:_____/10:00353788 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Characterization of off-axis single target RF magnetron co-sputtered iron doped tin

Original language description

The iron doped SnO2 coatings for sensor applications were studied by AFM, XPS, RBS and XRD techniques. The coatings were deposited by a magnetron sputtering from a single SnO2 target with an iron inset. Two different off-axis deposition arrangements wereinvestigated. The iron concentration in the coating was controlled in the range from 0 up to 5 at.% by two basic external parameters, the fraction of the iron stripe directly in the erosion zone and the RF power. The deposition process was reproducibleand deposited substoichiometric Fe:SnO2 films were homogenous, flat, amorphous and thermally stable up to post deposition annealing at 600 °C. The elevated deposition temperatures up to 400 °C and post annealing up to 600 °C for 10 min or 400 °C for 25 hhad no significant influence on the composition, the topology and the structure of coatings. The iron dopant in the film has probably ?-Fe2O3 bonding structure.

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BL - Plasma physics and discharge through gases

OECD FORD branch

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Project

<a href="/en/project/LC06041" target="_blank" >LC06041: Preparation, modification and characterization of materials by energetic radiation.</a><br>

Continuities

Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2010

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Surface and Coatings Technology

ISSN

0257-8972

e-ISSN

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Volume of the periodical

205

Issue of the periodical within the volume

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Country of publishing house

CH - SWITZERLAND

Number of pages

5

Pages from-to

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UT code for WoS article

000286343200025

EID of the result in the Scopus database

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