Chromatic monitoring of downstream microwave plasma source.
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F46747885%3A24210%2F00%3A00000077" target="_blank" >RIV/46747885:24210/00:00000077 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Chromatic monitoring of downstream microwave plasma source.
Original language description
The application of the chromatic sensing for monitoring of a microwave plasma source is described. The emitted radiation from the plasma excited in the argon, oxygen and CF4 mixture was measured with three PIN-
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
JB - Sensors, detecting elements, measurement and regulation
OECD FORD branch
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Result continuities
Project
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Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2000
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
19th Symposium on Plasma Physics and Technology
ISBN
AIIN 0011-4626
ISSN
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e-ISSN
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Number of pages
6
Pages from-to
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Publisher name
Institute of Plasma Physics Za Slovankou 3, 182 21 Prague 8, Czech Republic
Place of publication
Praha
Event location
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Event date
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Type of event by nationality
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UT code for WoS article
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