Application of quadrupole mass spectrometry and gas chromatography for plasma analysis of neutral species of processing plasma

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F44555601%3A13430%2F03%3A00002321" target="_blank" >RIV/44555601:13430/03:00002321 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Application of quadrupole mass spectrometry and gas chromatography for plasma analysis of neutral species of processing plasma
Original language description
For a number of applications of plasma surface processing it is helpful to know the nature of the neutral species presented in the plasma. In our experiment the influence of the plasma gas composition on the plasma oxidation process in oxygen and oxygen/argon plasma was studied. The plasma gas phase reaction by-products were determined by using quadrupole mass spectrometry (QMS) and gas chromatography (GC) methods. The analysis of neutral plasma gas phase composition provides an information on changes in the plasma gas composition during the plasma oxidation of thin metal films and consequently on the stability and reproducibility of the plasma process. The experiments were carried out in the system for the plasma-chemical surface modification of thinfilms.
Czech name
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Czech description
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Project
<a href="/en/project/OC%20527.50" target="_blank" >OC 527.50: Polymer Thin Films Study by AFM and Improvement of Plasma Diagnostics Methods</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year
2003
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
Proceedings of 16th International Symposium on Plasma Chemistry
ISBN
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ISSN
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e-ISSN
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Number of pages
1
Pages from-to
119
Publisher name
University of Bari
Place of publication
Bari
Event location
Taormina - Italy
Event date
Jun 22, 2003
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
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