The Mass Spectrometry Study of Plasma Composition during Plasma Oxidation of Thin Metal

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F44555601%3A13430%2F01%3A00001433" target="_blank" >RIV/44555601:13430/01:00001433 - isvavai.cz</a>
Result on the web
—
DOI - Digital Object Identifier
—

Result language
angličtina
Original language name
The Mass Spectrometry Study of Plasma Composition during Plasma Oxidation of Thin Metal
Original language description
All impurities even in small concentrations can play a significant role in plasma technologies. In our experiment the influence of impurities on the oxidation process in oxygen and oxygen/argon plasma was studied. The mass spectrometry analysis of plasmacomposition of the neutral process gas was extracted from the active plasma zone and transported through the pressure reduction system to the QMS sampling cell. New software for the mass spectra analysis based on the calculation of relative representation of species in measured spectra using library databases was created. The analysis of the QMS spectra during plasma oxidation gives an information on changes in the plasma gas composition inside the discharge tube and conseguntly on the stability and reproducibility of the plasma process.
Czech name
—
Czech description
—

Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
—

Project
<a href="/en/project/OC%20527.50" target="_blank" >OC 527.50: Polymer Thin Films Study by AFM and Improvement of Plasma Diagnostics Methods</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year
2001
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Similar results(10)