Study of Oxygen Plasma Using Mass Spectrometry during Plasma Oxidation of Aluminium Thin Films

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F44555601%3A13430%2F01%3A00001434" target="_blank" >RIV/44555601:13430/01:00001434 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Study of Oxygen Plasma Using Mass Spectrometry during Plasma Oxidation of Aluminium Thin Films
Original language description
For a number of applications of plasma in surface processing it is helpful to know the nature and the relative abundance of neutral species presented in the plasma. This is also our ease in the plasma oxidation process using oxygen or oxygen/argon plasmas. This work deals with a use of guadrupole mass spectrometer (QMS) which embodies a residual gas analyzer (RGA) or an on-line gas analysis system to sample high-pressure gases. The system was used for detection of neutral species effusing from the discharge tube during plasma processing. Analysis of QMS spectra can give detailed information about changes of the plasma gas composition inside the discharge tube and conseguently about the stability and reproducibility of plasma conditions.
Czech name
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Czech description
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year
2001
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
Symposium Proceedings of 13th SAPP - Symposium on Application of Plasma Processes
ISBN
80-223-1573-7
ISSN
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e-ISSN
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Number of pages
2
Pages from-to
124-125
Publisher name
Universita Komenského
Place of publication
Bratislava
Event location
Tále, Nízké Tatry, Slovenská republika
Event date
Jan 15, 2001
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
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