A Quadrupole Mass Spectrometry Method for Study of Neutral Species of Processing Plasma

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F44555601%3A13430%2F00%3A00000556" target="_blank" >RIV/44555601:13430/00:00000556 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
A Quadrupole Mass Spectrometry Method for Study of Neutral Species of Processing Plasma
Original language description
For a number of applications of plasma in surface processing it is helpful to know the nature and relative abundances of the neutral species present in the plasma. This is our case in the plasma oxidation process using oxygen/argon plasma. The analysis of plasma gas neutral species provides data for detailed study of plasma chemistry. This work deals with using quadrupole mass spectrometer (QMS) which is embodied in a residual gas analyser (RGA) or in an online gas analysis system to sample high pressure gasses. The system was used for the detection of neutral species effusing from discharge tube during plasma processing. In this case the gas pressure must be reduced from 10-1 - 1 torr range to 10-5 torr. We give a description of design that sort of pressure reduction system. To achieve a fast response time the pressure reduction system is pumped. From the active plasma zone a small amount of the process gas was extracted and transported through pressure reduction system to QMS. From t
Czech name
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Czech description
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year
2000
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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