Mass Spectrometry of Processing Plasma during Plasma Oxidation

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F44555601%3A13430%2F01%3A00001432" target="_blank" >RIV/44555601:13430/01:00001432 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Mass Spectrometry of Processing Plasma during Plasma Oxidation
Original language description
The monitoring of plasma gas guantitative composition during plasma oxidation of thin metal films was investigated by guadrupole mass spectrometry. A sampling gas system was developed for transportation and pressure reducion of the process gas from the discharge tube to the guadrupole mass spectrometer. The QMS spectra of gas samples extracted from discharge tube were measured in flowing regime for a discharge. The software for mass spectra analysis was developed, tested and used for the mass spectra evaluation. A few sets of data measured during plasma oxidation illustrate the performance of the sampling gas system as a sensitive QMS system which provides an important information on process parameters.
Czech name
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Czech description
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Project
<a href="/en/project/OC%20527.50" target="_blank" >OC 527.50: Polymer Thin Films Study by AFM and Improvement of Plasma Diagnostics Methods</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year
2001
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
Proc. 7th European Vacuum Conference and 3rd European Topical Conference on Hard Coatings -EVC - 7 and ETCH - 3
ISBN
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ISSN
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e-ISSN
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Number of pages
1
Pages from-to
61
Publisher name
Aseva
Place of publication
Madrid
Event location
Madrid, Španělsko
Event date
Sep 17, 2001
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
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