Study of Plasma Composition during Plasma Oxidation: The Mass Spectrometry Study

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F44555601%3A13430%2F03%3A00002319" target="_blank" >RIV/44555601:13430/03:00002319 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Study of Plasma Composition during Plasma Oxidation: The Mass Spectrometry Study

Original language description

The experiments were carried out in the system for the plasma chemical surface modification of thin metal films. The on-line gas analysis system is used for the mass spectrometry study of plasma composition during plasma oxidation of thin tin layers. A small amount of the neutral plasma gas phase is extracted from the active plasma zone and transported through the pressure reduction system to the sampling cell with quadrupole mass spectrometer (Balzers QMG 112). In addition to the comparative study of the plasma gas phase composition a gas chromatograph (HP 5890) was used. The direct coupling and sample injection to the gas chromatograph is not possible in our experimental set-up. A transportable sampling system was used. The quadrupole mass spectrometry and gas chromatography analysis of the process gas composition during plasma oxidation provide a basic information about changes in the plasma gas composition inside the discharge tube and consequently about the stability and reproduci

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BL - Plasma physics and discharge through gases

OECD FORD branch

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Project

<a href="/en/project/OC%20527.50" target="_blank" >OC 527.50: Polymer Thin Films Study by AFM and Improvement of Plasma Diagnostics Methods</a><br>

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2003

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Le Vide :science, technique et application

ISSN

1266-0167

e-ISSN

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Volume of the periodical

58

Issue of the periodical within the volume

307-suppl.

Country of publishing house

FR - FRANCE

Number of pages

3

Pages from-to

228-230

UT code for WoS article

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EID of the result in the Scopus database

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