Comparison of titanium oxide coatings deposited by PVD and PECVD.
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F46747885%3A24210%2F04%3A24210172" target="_blank" >RIV/46747885:24210/04:24210172 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Comparison of titanium oxide coatings deposited by PVD and PECVD.
Original language description
Composition and structure of thin layers are determined by deposition method and deposition parameters. Properties of coatings involving mechanical, tribological, optical, electri- cal, and other properties are closely connected to their compo- sition anstructure which means that their functionality is directly determined by the used deposition method. One of the new and very interesting coatings is the titanium oxide thin film. Large application of this film involves protective hard coatings on cuttingtool, optical films for optical filters or photo-catalytic layers. Each application set different demands on the film properties. The aim of the presented work is a comparison of titanium oxide coatings deposited by physical vapor deposition (PVD) and plasma enhanced chemical vapor deposition (PECVD) from various precursors. The films were characterized by various techniques including measurements of hardness and thickness by the ball-and-crater method (Calotest).
Czech name
Porovnání povlaků oxidu titanu vyloučených PVD a PECVD.
Czech description
Složení a struktura tenkých vrstev jsou určeny vylučovací metodou a vylučovacími parametry. Vlastnosti povlaků zahrnující jejich tribologické, optické. elektrické a jiné vlastnosti jsou úzce spojeny s jejich složením a strukturou, což znamená, že jejichunkčnost je přímo určena použitou vylučovací metodou.
Classification
Type
D - Article in proceedings
CEP classification
JK - Corrosion and material surfaces
OECD FORD branch
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Result continuities
Project
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Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2004
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
47th SVC Annual Technical Conference Proceeding
ISBN
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ISSN
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e-ISSN
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Number of pages
4
Pages from-to
46-49
Publisher name
Society of Vacuum Coaters
Place of publication
Dallas, USA
Event location
Dallas, USA
Event date
Jan 1, 2004
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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