Non-linear piezoelectric properties of the thin Pb(ZrxTi1-x)O3 (PZT) films deposited on the Si-substrate
Result description
Some non-linear piezoelectric properties are investigated in PZT thin films, sputtered on the Si/SiO2/Ti/Pt substrates.The piezoel response for PZT(60/40) and near MPB (54/46) rhombohedral compositions,(111) and (001) orientations has been observed.
Keywords
The result's identifiers
Result code in IS VaVaI
Alternative codes found
RIV/46747885:24220/05:00000117
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Non-linear piezoelectric properties of the thin Pb(ZrxTi1-x)O3 (PZT) films deposited on the Si-substrate
Original language description
Some non-linear piezoelectric properties are investigated in PZT thin films, sputtered on the Si/SiO2/Ti/Pt substrates.The piezoel response for PZT(60/40) and near MPB (54/46) rhombohedral compositions,(111) and (001) orientations has been observed.
Czech name
Nelineární piezoelektrické vlastnosti tenkých filmů Pb(ZrxTi1-x)O3 (PZT) nanesených na Si-substrát
Czech description
Vyšetřovány jsou nelineární vlastnosti PZT tenkých filmů, nanesených na Si/SiO2/Ti/Pt substrát. Piezoel odezva byla zjištěna pro PZT (60/40) (111) a PZT (54/46) orientace (001) v blízkosti MPB.
Classification
Type
Jx - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BM - Solid-state physics and magnetism
OECD FORD branch
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Result continuities
Project
GA202/03/0569: Electromechanical properties of ceramics and layer composites
Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2005
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Journal of the European Ceramic Society
ISSN
0955-2219
e-ISSN
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Volume of the periodical
2
Issue of the periodical within the volume
2005
Country of publishing house
GB - UNITED KINGDOM
Number of pages
5
Pages from-to
2257-2261
UT code for WoS article
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EID of the result in the Scopus database
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Result type
Jx - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP
BM - Solid-state physics and magnetism
Year of implementation
2005