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Non-linear piezoelectric properties of the thin Pb(ZrxTi1-x)O3 (PZT) films deposited on the Si-substrate

Result description

Some non-linear piezoelectric properties are investigated in PZT thin films, sputtered on the Si/SiO2/Ti/Pt substrates.The piezoel response for PZT(60/40) and near MPB (54/46) rhombohedral compositions,(111) and (001) orientations has been observed.

Keywords

PZTthin filmsSi substratenelinear properties

The result's identifiers

Alternative languages

  • Result language

    angličtina

  • Original language name

    Non-linear piezoelectric properties of the thin Pb(ZrxTi1-x)O3 (PZT) films deposited on the Si-substrate

  • Original language description

    Some non-linear piezoelectric properties are investigated in PZT thin films, sputtered on the Si/SiO2/Ti/Pt substrates.The piezoel response for PZT(60/40) and near MPB (54/46) rhombohedral compositions,(111) and (001) orientations has been observed.

  • Czech name

    Nelineární piezoelektrické vlastnosti tenkých filmů Pb(ZrxTi1-x)O3 (PZT) nanesených na Si-substrát

  • Czech description

    Vyšetřovány jsou nelineární vlastnosti PZT tenkých filmů, nanesených na Si/SiO2/Ti/Pt substrát. Piezoel odezva byla zjištěna pro PZT (60/40) (111) a PZT (54/46) orientace (001) v blízkosti MPB.

Classification

  • Type

    Jx - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

  • CEP classification

    BM - Solid-state physics and magnetism

  • OECD FORD branch

Result continuities

Others

  • Publication year

    2005

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Name of the periodical

    Journal of the European Ceramic Society

  • ISSN

    0955-2219

  • e-ISSN

  • Volume of the periodical

    2

  • Issue of the periodical within the volume

    2005

  • Country of publishing house

    GB - UNITED KINGDOM

  • Number of pages

    5

  • Pages from-to

    2257-2261

  • UT code for WoS article

  • EID of the result in the Scopus database