High-rate pulsed reactive magnetron sputtering of oxide nanocomposite coatings

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F13%3A43915967" target="_blank" >RIV/49777513:23520/13:43915967 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1016/j.vacuum.2012.02.023" target="_blank" >http://dx.doi.org/10.1016/j.vacuum.2012.02.023</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.vacuum.2012.02.023" target="_blank" >10.1016/j.vacuum.2012.02.023</a>

Result language
angličtina
Original language name
High-rate pulsed reactive magnetron sputtering of oxide nanocomposite coatings
Original language description
The article reports on the oxide nanocomposite coatings reactively sputtered by a pulsed dual magnetron and consists of two parts. The first part briefly describes main problems in the reactive sputtering of oxides. The second part is devoted to transparent oxide coatings. Two types of oxide coatings are described in detail. It is shown that coatings with relatively high hardness, low effective Young's modulus are highly elastic and exhibit an enhanced resistance to cracking.
Czech name
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Czech description
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Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Project
<a href="/en/project/GAP108%2F12%2F0393" target="_blank" >GAP108/12/0393: Hard nanocomposite coatings with enhanced toughness and unique properties</a><br>
Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year
2013
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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