Effect of the Si content on the microstructure of hard, multifunctional Hf-B-Si-C films prepared by pulsed magnetron sputtering

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F15%3A43926780" target="_blank" >RIV/49777513:23520/15:43926780 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1016/j.apsusc.2015.09.249" target="_blank" >http://dx.doi.org/10.1016/j.apsusc.2015.09.249</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.apsusc.2015.09.249" target="_blank" >10.1016/j.apsusc.2015.09.249</a>

Result language
angličtina
Original language name
Effect of the Si content on the microstructure of hard, multifunctional Hf-B-Si-C films prepared by pulsed magnetron sputtering
Original language description
Pulsed magnetron sputtering in pure Ar was used to deposit multifunctional Hf-B-Si-C films with a chemical composition in at% Hf27B57C8, Hf23B55Si2C11, Hf22B54Si9C9 and Hf21B28Si35C7. The effect of Si content in the microstructure evolution of the filmswas studied by X-ray photoelectron spectroscopy, X-ray diffraction, electron diffraction and high-resolution transmission electron microscopy. The Hf27B57C8 film is composed of hexagonal HfB2 nano-columnar structures (~ 50-60 nm long, and ~ 5-10 nm wide). The Hf23B55Si2C11 film consists of finer HfB2 nanocrystal columnar structures (~ 20-30 nm long and < 5 nm wide) concealed by ~ 1 nm thick amorphous boundaries. Further incorporation of Si into the films results in microstructural refinement and promotes the formation of an amorphous structure. As the Si content increases, the size of the HfB2 nanocrystals decreases from 50-60 nm down to 1-2 nm and the nanocrystals become randomly oriented. This is consistent with the observed reduction
Czech name
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Czech description
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Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
JI - Composite materials
OECD FORD branch
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Project
<a href="/en/project/GA14-03875S" target="_blank" >GA14-03875S: Nanostructured multifunctional coatings prepared using highly ionized pulsed plasmas</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2015
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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