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Ground state atomic oxygen in high-power impulse magnetron sputtering: a quantitative study

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F17%3A43931446" target="_blank" >RIV/49777513:23520/17:43931446 - isvavai.cz</a>

  • Result on the web

    <a href="http://dx.doi.org/10.1088/1361-6463/aa560c" target="_blank" >http://dx.doi.org/10.1088/1361-6463/aa560c</a>

  • DOI - Digital Object Identifier

    <a href="http://dx.doi.org/10.1088/1361-6463/aa560c" target="_blank" >10.1088/1361-6463/aa560c</a>

Alternative languages

  • Result language

    angličtina

  • Original language name

    Ground state atomic oxygen in high-power impulse magnetron sputtering: a quantitative study

  • Original language description

    The ground state density of oxygen atoms in reactive high-power impulse magnetron sputtering discharges has been studied quantitatively. Both time-resolved and space-resolved measurements were conducted. The measurements were performed using two-photon absorption laser-induced fluorescence (TALIF), and calibrated by optical emission actinometry with multiple Ar emission lines. The results clarify the dynamics of the O ground state atoms in the discharge afterglow significantly, including their propagation and fast decay after the plasma pulse, as well as the influence of gas pressure, O2 admixture, etc.

  • Czech name

  • Czech description

Classification

  • Type

    J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database

  • CEP classification

  • OECD FORD branch

    10305 - Fluids and plasma physics (including surface physics)

Result continuities

  • Project

  • Continuities

    S - Specificky vyzkum na vysokych skolach

Others

  • Publication year

    2017

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Name of the periodical

    JOURNAL OF PHYSICS D-APPLIED PHYSICS

  • ISSN

    0022-3727

  • e-ISSN

  • Volume of the periodical

    50

  • Issue of the periodical within the volume

    7

  • Country of publishing house

    GB - UNITED KINGDOM

  • Number of pages

    13

  • Pages from-to

    „075204-1“-„075204-13“

  • UT code for WoS article

    000394096500001

  • EID of the result in the Scopus database

    2-s2.0-85011320431