Ground state atomic oxygen in high-power impulse magnetron sputtering: a quantitative study
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F17%3A43931446" target="_blank" >RIV/49777513:23520/17:43931446 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1088/1361-6463/aa560c" target="_blank" >http://dx.doi.org/10.1088/1361-6463/aa560c</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1088/1361-6463/aa560c" target="_blank" >10.1088/1361-6463/aa560c</a>
Alternative languages
Result language
angličtina
Original language name
Ground state atomic oxygen in high-power impulse magnetron sputtering: a quantitative study
Original language description
The ground state density of oxygen atoms in reactive high-power impulse magnetron sputtering discharges has been studied quantitatively. Both time-resolved and space-resolved measurements were conducted. The measurements were performed using two-photon absorption laser-induced fluorescence (TALIF), and calibrated by optical emission actinometry with multiple Ar emission lines. The results clarify the dynamics of the O ground state atoms in the discharge afterglow significantly, including their propagation and fast decay after the plasma pulse, as well as the influence of gas pressure, O2 admixture, etc.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10305 - Fluids and plasma physics (including surface physics)
Result continuities
Project
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Continuities
S - Specificky vyzkum na vysokych skolach
Others
Publication year
2017
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
JOURNAL OF PHYSICS D-APPLIED PHYSICS
ISSN
0022-3727
e-ISSN
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Volume of the periodical
50
Issue of the periodical within the volume
7
Country of publishing house
GB - UNITED KINGDOM
Number of pages
13
Pages from-to
„075204-1“-„075204-13“
UT code for WoS article
000394096500001
EID of the result in the Scopus database
2-s2.0-85011320431