Quantification of the hysteresis and related phenomena in reactive HiPIMS discharges
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F17%3A43931478" target="_blank" >RIV/49777513:23520/17:43931478 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1063/1.4977819" target="_blank" >http://dx.doi.org/10.1063/1.4977819</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1063/1.4977819" target="_blank" >10.1063/1.4977819</a>
Alternative languages
Result language
angličtina
Original language name
Quantification of the hysteresis and related phenomena in reactive HiPIMS discharges
Original language description
Reactive high-power impulse magnetron sputtering discharge has been studied experimentally combining optical emission, absorption, and laser-based diagnostic techniques. The quantification of the atomic ground state densities is performed using optical emission spectroscopy. Hysteresis behavior as a function of molecular oxygen flow fraction in Ar-O2 mixture has been observed for numerous discharge parameters, such as the ground state density of O atoms, density of the sputtered atoms and ions, Ar metastables, etc. The obtained atomic number densities are found to be in full agreement with the known models of reactive sputter deposition. The relevant plasma kinetic mechanisms influencing the measured trends are analyzed.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10305 - Fluids and plasma physics (including surface physics)
Result continuities
Project
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Continuities
S - Specificky vyzkum na vysokych skolach
Others
Publication year
2017
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Journal of Applied Physics
ISSN
0021-8979
e-ISSN
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Volume of the periodical
121
Issue of the periodical within the volume
17
Country of publishing house
US - UNITED STATES
Number of pages
10
Pages from-to
„171905-1“-„171905-10“
UT code for WoS article
000400623700007
EID of the result in the Scopus database
2-s2.0-85014561556