Return of target material ions leads to a reduced hysteresis in reactive high power impulse magnetron sputtering: Experiment

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F17%3A43931741" target="_blank" >RIV/49777513:23520/17:43931741 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1063/1.4977816" target="_blank" >http://dx.doi.org/10.1063/1.4977816</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1063/1.4977816" target="_blank" >10.1063/1.4977816</a>

Result language
angličtina
Original language name
Return of target material ions leads to a reduced hysteresis in reactive high power impulse magnetron sputtering: Experiment
Original language description
Titanium and aluminum targets have been reactively sputtered in Ar+O2 or Ar+N2 gas mixtures in order to systematically investigate the effect of reduced hysteresis in reactive high power impulse magnetron sputtering (HiPIMS) as compared to other sputtering techniques utilizing low discharge target power density (e.g., direct current or pulsed direct current mid-frequency magnetron sputtering) operated at the same average discharge power. We found that the negative slope of the flow rate of the reactive gas gettered by the sputtered target material as a function of the reactive gas partial pressure is clearly lower in case of HiPIMS. This results in a lower critical pumping speed, which implies a reduced hysteresis. We argue that the most important effect explaining the observed behavior is covering of the reacted areas of the target by the returning ionized metal, effectively lowering the target coverage at a given partial pressure. This explanation is supported by a calculation using an analytical model of reactive HiPIMS with time and space averaging (developed by us).
Czech name
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Czech description
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Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10305 - Fluids and plasma physics (including surface physics)

Project
<a href="/en/project/EE2.3.30.0013" target="_blank" >EE2.3.30.0013: Excellence in human resources as a source of competitiveness</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2017
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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