Return of target material ions leads to a reduced hysteresis in reactive high power impulse magnetron sputtering: Model
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F17%3A43931742" target="_blank" >RIV/49777513:23520/17:43931742 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1063/1.4977815" target="_blank" >http://dx.doi.org/10.1063/1.4977815</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1063/1.4977815" target="_blank" >10.1063/1.4977815</a>
Alternative languages
Result language
angličtina
Original language name
Return of target material ions leads to a reduced hysteresis in reactive high power impulse magnetron sputtering: Model
Original language description
A tendency to disappearing hysteresis in reactive High Power Impulse Magnetron Sputtering (HiPIMS) has been reported previously without full physical explanation. An analytical model of reactive pulsed sputtering including HiPIMS is presented. The model combines a Berg-type model of reactive sputtering with the global HiPIMS model of Christie-Vlček. Both time and area averaging is used to describe the macroscopic steady state, especially the reactive gas balance in the reactor. The most important effect in the presented model is covering of reacted parts of target by the returning ionized metal, effectively lowering the target coverage by reaction product at a given partial pressure. The return probability of ionized sputtered metal has been selected as a parameter to quantify the degree of HiPIMS effects. The model explains the reasons for reduced hysteresis in HiPIMS. The critical pumping speed was up to a factor of 7 lower in reactive HiPIMS compared to the mid-frequency magnetron sputtering. The model predicts reduced hysteresis in HiPIMS due to less negative slope of metal flux to substrates and of reactive gas sorption as functions of reactive gas partial pressure. Higher deposition rate of reactive HiPIMS compared to standard reactive sputtering is predicted for some parameter combinations. Comparison of the model with experiment exhibits good qualitative and quantitative agreement for three material combinations, namely, Ti-O2, Al-O2, and Ti-N2.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10305 - Fluids and plasma physics (including surface physics)
Result continuities
Project
<a href="/en/project/EE2.3.30.0013" target="_blank" >EE2.3.30.0013: Excellence in human resources as a source of competitiveness</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2017
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Journal of Applied Physics
ISSN
0021-8979
e-ISSN
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Volume of the periodical
121
Issue of the periodical within the volume
17
Country of publishing house
US - UNITED STATES
Number of pages
18
Pages from-to
„171910-1“-„171910-18“
UT code for WoS article
000400623700012
EID of the result in the Scopus database
2-s2.0-85015433002