Magnetron sputtered Hf–B–Si–C–N films with controlled electrical conductivity and optical transparency, and with ultrahigh oxidation resistance

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F18%3A43951132" target="_blank" >RIV/49777513:23520/18:43951132 - isvavai.cz</a>
Alternative codes found
RIV/61389005:_____/18:00489160
Result on the web
<a href="https://doi.org/10.1016/j.tsf.2018.03.064" target="_blank" >https://doi.org/10.1016/j.tsf.2018.03.064</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.tsf.2018.03.064" target="_blank" >10.1016/j.tsf.2018.03.064</a>

Result language
angličtina
Original language name
Magnetron sputtered Hf–B–Si–C–N films with controlled electrical conductivity and optical transparency, and with ultrahigh oxidation resistance
Original language description
The paper deals with Hf–B–Si–C–N films deposited onto Si and SiC substrates using pulsed magnetron co-sputtering of a single B4C–Hf–Si target (at a fixed 15% Hf and 20% Si fractions in the target erosion area) in nitrogen–argon gas mixtures. We focus on the effect of the nitrogen fraction in the gas mixture (in the range from 0% to 50%) and of the duty cycle (85% and 50%) on the structure and properties of the films. We show that increasing nitrogen fraction in the gas mixture and consequently in the films (up to 52 at.%) results in a strong amorphization of the film structure, decrease in the hardness, rapid rise in the electrical resistivity and in the optical transparency, and increasing onset temperature of the oxidation. For two selected compositions, one electrically conductive and one optically transparent, we show their oxidation resistance up to as much as 1600 °C. The results are important for designing high-temperature protective coatings of electronic and optical elements, and sensors for severe oxidation environments.
Czech name
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Czech description
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Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
20506 - Coating and films

Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2018
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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