Tuning Stoichiometry and Structure of Pd-WO3−x Thin Films for Hydrogen Gas Sensing by High-Power Impulse Magnetron Sputtering
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F20%3A43960051" target="_blank" >RIV/49777513:23520/20:43960051 - isvavai.cz</a>
Result on the web
<a href="https://doi.org/10.3390/ma13225101" target="_blank" >https://doi.org/10.3390/ma13225101</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.3390/ma13225101" target="_blank" >10.3390/ma13225101</a>
Alternative languages
Result language
angličtina
Original language name
Tuning Stoichiometry and Structure of Pd-WO3−x Thin Films for Hydrogen Gas Sensing by High-Power Impulse Magnetron Sputtering
Original language description
By tuning the deposition parameters of reactive high-power impulse magnetron sputtering, specifically the pulse length, we were able to prepare WO3−x films with various stoichiometry and structure. Subsequently, the films were annealed in air at moderate temperature (350 °C). We demonstrate that the stoichiometry of the as-deposited films influences considerably the type of crystalline phase formed in the annealed films. The appropriate sub-stoichiometry of the films (approx. WO2.76) enabled crystallization of the monoclinic phase during the annealing. This phase is favorable for hydrogen sensing applications. To characterize the sensory behavior of the films, the tungsten oxide films were decorated by Pd nanoparticles before annealing and were assembled as a conductometric gas sensor. The sensory response of the films that crystallized in the monoclinic structure was proven to be superior to that of the films containing other phases
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
20506 - Coating and films
Result continuities
Project
<a href="/en/project/GA19-13174S" target="_blank" >GA19-13174S: Advanced hydrogen-gas sensing nanomaterials with a tailored architecture</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2020
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Materials
ISSN
1996-1944
e-ISSN
—
Volume of the periodical
13
Issue of the periodical within the volume
22
Country of publishing house
CH - SWITZERLAND
Number of pages
12
Pages from-to
„5101-1“-„5101-12“
UT code for WoS article
000594972800001
EID of the result in the Scopus database
2-s2.0-85096083826