Physical Characterization of Hafnium Oxide Thin Films Annealed in Vacuum
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61989592%3A15310%2F18%3A73590550" target="_blank" >RIV/61989592:15310/18:73590550 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.4028/www.scientific.net/KEM.784.135" target="_blank" >http://dx.doi.org/10.4028/www.scientific.net/KEM.784.135</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.4028/www.scientific.net/KEM.784.135" target="_blank" >10.4028/www.scientific.net/KEM.784.135</a>
Alternative languages
Result language
angličtina
Original language name
Physical Characterization of Hafnium Oxide Thin Films Annealed in Vacuum
Original language description
Hafnium oxide (HfO2) is a material characterized by a good mechanical, thermal and chemical stability and is used as a material in a variety of technological applications in optics and electronics. In this work the influence of annealing temperature on the mechanical structural properties of amorphous HfO2 thin film was explored. Films were deposited by electron beam evaporation and annealed in the temperature range from 200 °C to 500 °C in vacuum. Mechanical properties such as hardness and elastic modulus were determined using nanoindentation, while cohesive-adhesive properties of the film using a scratch test. Surface morphology was determined using a confocal microscope and structure using XRD. The transformation of amorphous phase of the films to the nanocrystalline monoclinic phase was observed after vacuum annealing at 500 °C. This crystallization leads to increase in hardness on one hand but also to growth of brittleness and in turn to decrease in scratch resistance on the other hand.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
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OECD FORD branch
10306 - Optics (including laser optics and quantum optics)
Result continuities
Project
<a href="/en/project/LO1305" target="_blank" >LO1305: Development of the center of advanced technologies and materials</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2018
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Local Mechanical Properties XIII
ISBN
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ISSN
1013-9826
e-ISSN
1662-9795
Number of pages
6
Pages from-to
135-140
Publisher name
Trans Tech Publications Ltd
Place of publication
Zurich
Event location
Košice
Event date
Nov 6, 2017
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
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