Mechanical and optical properties of HfO2 thin films prepared by evaporation with ion-assisted deposition

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F25%3A00642493" target="_blank" >RIV/68378271:_____/25:00642493 - isvavai.cz</a>

Alternative codes found

RIV/61989592:15310/25:73632761

Result on the web

<a href="https://doi.org/10.1016/j.mtcomm.2025.114125" target="_blank" >https://doi.org/10.1016/j.mtcomm.2025.114125</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.mtcomm.2025.114125" target="_blank" >10.1016/j.mtcomm.2025.114125</a>

Result language

angličtina

Original language name

Mechanical and optical properties of HfO2 thin films prepared by evaporation with ion-assisted deposition

Original language description

Hafnium dioxide (HfO2) is a material characterised by a unique combination of mechanical, thermal, and chemical stability. It is used in a wide range technological applications in electronics and optics. This article investigates how different deposition methods and subsequent annealing processes affect the structural, mechanical, and optical properties of HfO2 thin films. The films were deposited by electron beam evaporation, with and without ion-assisted deposition (IAD), followed by annealing at various temperatures (300-600 degrees C) in either vacuum or air. Mechanical properties such as hardness and elastic modulus were determined using nanoindentation. Cohesive and adhesive properties of the films were examined using scratch tests. Surface morphology was determined using a confocal microscope and the structure was studied by X-ray diffraction (XRD). Optical properties such as refractive index and absorption coefficient were measured by means of spectroscopic ellipsometry. The effects of the deposition method and subsequent annealing on the film properties were clearly observed. In general, films produced with IAD exhibited better ability to crystallise, improved mechanical properties, significantly higher value of hardness (above 30 % higher for as-deposited films) and considerably better scratch resistance, and higher refractive index due to higher film density. Annealing proved to be an effective tool for inducing phase transformation from an amorphous to a crystalline structure. The structural changes due to annealing were accompanied by changes in mechanical properties such as sudden increase in hardness of 20 - 27 %. Air-annealed films were harder than vacuum-annealed ones. Films deposited without IAD had lower refractive index after air annealing than after vacuum annealing, while IAD films showed no significant change in refractive index upon annealing.

Czech name

—

Czech description

—

Type

J_imp - Article in a specialist periodical, which is included in the Web of Science database

CEP classification

—

OECD FORD branch

10302 - Condensed matter physics (including formerly solid state physics, supercond.)

Project

<a href="/en/project/EF17_049%2F0008422" target="_blank" >EF17_049/0008422: Research and Development Network in the Field of Lightening and Imaging Technologies and Optoelectronics for Optics and Automotive Industry</a><br>

Continuities

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year

2025

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Materials Today Communications

ISSN

2352-4928

e-ISSN

2352-4928

Volume of the periodical

49

Issue of the periodical within the volume

Dec

Country of publishing house

NL - THE KINGDOM OF THE NETHERLANDS

Number of pages

11

Pages from-to

114125

UT code for WoS article

001606038700002

EID of the result in the Scopus database

2-s2.0-105020861575