Effect of air annealing on mechanical properties and structure of amorphous B4C films

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61989592%3A15310%2F11%3A33116604" target="_blank" >RIV/61989592:15310/11:33116604 - isvavai.cz</a>
Alternative codes found
RIV/68378271:_____/11:00363873
Result on the web
<a href="http://dx.doi.org/10.1016/j.surfcoat.2011.02.052" target="_blank" >http://dx.doi.org/10.1016/j.surfcoat.2011.02.052</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.surfcoat.2011.02.052" target="_blank" >10.1016/j.surfcoat.2011.02.052</a>

Result language
angličtina
Original language name
Effect of air annealing on mechanical properties and structure of amorphous B4C films
Original language description
Amorphous B4C films were prepared by magnetron sputtering of the hot-pressed B4C target in different regimes. Hardness, intrinsic stress and film structure were investigated in dependence on the annealing temperature in air. Changes in the film structureand composition were investigated by Raman spectroscopy, confocal microscopy, and electron probe microanalysis.It has been shown that an annealing at 500 °C for 1 h leads to stress reduction, slight thickness decrease and increase of film hardness. However already at 600 °C the film oxidation proceeds very intensively with formation of the phases of boron oxide and amorphous carbon in the surface layer. The thickness of the film decreases quickly.
Czech name
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Czech description
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Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BH - Optics, masers and lasers
OECD FORD branch
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2011
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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