Effect of temperature treatment on mechanical properties of amorphous boron carbide thin films
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61989592%3A15310%2F11%3A33140148" target="_blank" >RIV/61989592:15310/11:33140148 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Effect of temperature treatment on mechanical properties of amorphous boron carbide thin films
Original language description
Nanoindentation tests have been performed to investigate the effect of temperature treatment on mechanical properties (hardness and elastic modulus) of magnetron sputtered amorphous boron carbide thin films. Variations in a film thickness and internal stress were studied as well. Films were investigated in two ways (i) after annealing in air for one hour at temperatures of 300, 400, 500 and 600 °C (ii) in-situ high temperature measurements at 100, 200, 300 and 400 °C. Increasing the annealing temperature up to 500 °C leads to the stress reduction, slight decrease of the thickness and increase in the film hardness. However already at 600 °C the dramatic film thickness reduction takes place. Hot stage nanoindentation tests show that surface hardness andelastic modulus are almost constant with temperature up to 400 °C.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
BH - Optics, masers and lasers
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2011
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Proceedings 49th International Scientific Conference Experimentální anlýza napětí 2011 / Experimental Stress Analysis 2011
ISBN
978-80-214-4275-7
ISSN
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e-ISSN
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Number of pages
5
Pages from-to
39-43
Publisher name
Vysoké učení technické
Place of publication
Brno
Event location
Znojmo
Event date
Jun 6, 2011
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
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