Mechanical properties of amorphous silicon carbonitride thin films at elevated temperatures

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F15%3A00510824" target="_blank" >RIV/68378271:_____/15:00510824 - isvavai.cz</a>
Alternative codes found
RIV/61989592:15310/15:33154106
Result on the web
<a href="https://doi.org/10.1007/s10853-014-8715-0" target="_blank" >https://doi.org/10.1007/s10853-014-8715-0</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1007/s10853-014-8715-0" target="_blank" >10.1007/s10853-014-8715-0</a>

Result language
angličtina
Original language name
Mechanical properties of amorphous silicon carbonitride thin films at elevated temperatures
Original language description
The mechanical properties of amorphous silicon carbonitride (a-SiCx Ny ) films with various nitrogen content (y = 0–40 at.%) were investigated in situ at elevated temperatures up to 650 °C in inert atmosphere. A SiC film was measured also at 700 °C in air. The hardness and elastic modulus were evaluated using instrumented nanoindentation with thermally stable cubic boron nitride Berkovich indenter. Both the sample and the indenter were separately heated during the experiments to temperatures of 300, 500, and 650 °C. Short duration high temperature creep tests (1200 s) of the films were also carried out. The results revealed that the room temperature hardness and elastic modulus deteriorate with the increase of the nitrogen content.
Czech name
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Czech description
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Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10302 - Condensed matter physics (including formerly solid state physics, supercond.)

Project
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Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2015
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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